DocumentCode :
2218197
Title :
Integrated microwave filters in MCM-D
Author :
Pieters, Philip ; Brebels, Steven ; Beyne, Eric
Author_Institution :
IMEC, Leuven, Belgium
fYear :
1996
fDate :
6-7 Feb 1996
Firstpage :
61
Lastpage :
66
Abstract :
Thin film multilayer Multichip Module technology (MCM-D) may be used to realise microwave circuits such as capacitors and inductors. These may be combined to form passive filter structures. Such filters are an essential element of microwave circuits. On monolithic microwave integrated circuits, these structures require a large area resulting in a high cost. In this paper we present microwave filters integrated in multilayer MCM-D technology. As MCM-D also provides the interconnect between the individual microwave components, an integrated microwave Junction is realised, reducing the global system cost. The inductive and capacitive elements that are used to realise the filters are presented. The design of a low pass and a band pass filter using these elements is discussed. Finally, measurements of realised filters are presented
Keywords :
band-pass filters; inductors; low-pass filters; microwave filters; microwave integrated circuits; multichip modules; passive filters; thin film capacitors; thin film circuits; MCM-D technology; MIC; MIM capacitor; band pass filter; capacitive elements; inductive elements; integrated microwave filters; low pass filter; microwave circuits; multilayer multichip module; passive filter structures; thin film multilayer MCM technology; Band pass filters; Costs; Integrated circuit technology; Microwave circuits; Microwave filters; Microwave technology; Multichip modules; Nonhomogeneous media; Thin film circuits; Thin film inductors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Multi-Chip Module Conference, 1996. MCMC-96, Proceedings., 1996 IEEE
Conference_Location :
Santa Cruz, CA
Print_ISBN :
0-8186-7286-2
Type :
conf
DOI :
10.1109/MCMC.1996.510770
Filename :
510770
Link To Document :
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