Title :
Macroparticle filtering of high-current vacuum arc plasmas
Author :
Schülke, Thomas ; Anders, André ; Siemroth, Peter
Author_Institution :
Fraunhofer-Inst. for Mater. Phys. & Surface Eng., Dresden, Germany
Abstract :
The transport of vacuum arc plasmas through a 90° curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the range of a few kA, exceeding considerably the level of what has been reported in literature. The main question investigated was whether magnetic macroparticle filters could be scaled-up and simultaneously maintaining the transport efficiency of small filters. In front of the cathode we found arc-current-depending total ion saturation currents in the range from 10 to 23% of the arc current. The best transport efficiency was 25% (time integrated output/time integrated input) at a duct wall bias of 12.5 V and at an axial magnetic field of about 100 mT. This is comparable to what has been observed with other, low-current filters
Keywords :
cathodes; plasma density; plasma deposited coatings; plasma deposition; plasma production; plasma transport processes; vacuum arcs; 100 mT; 12.5 V; axial magnetic field; carbon cathode; diamond like carbon films deposition; duct wall bias; high-current pulsed arc source; high-current vacuum arc plasmas; low-current filters; macroparticle filtering; magnetic macroparticle filters; peak arc current; plasma density distribution; time integrated output/time integrated input; total ion saturation currents; transport efficiency; Cathodes; Ducts; Filtering; Filters; Magnetic fields; Magnetic separation; Plasma sources; Plasma transport processes; Saturation magnetization; Vacuum arcs;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 1996. Proceedings. ISDEIV., XVIIth International Symposium on
Conference_Location :
Berkeley, CA
Print_ISBN :
0-7803-2906-6
DOI :
10.1109/DEIV.1996.545497
