DocumentCode
2219316
Title
Fabrication and Characterization of Spinel Magnetic Nanoparticle Thin Film Transmission Lines
Author
Morton, Matthew A. ; Vestal, Christy R. ; Papapolymerou, John ; Zhang, Z.John
Author_Institution
School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive, Atlanta GA 30332-0250, USA. Phone: (404) 385-3018, Fax: (404) 894-0222, e-mail: gtg311j@mail.gatech.edu
fYear
2003
fDate
Oct. 2003
Firstpage
1307
Lastpage
1309
Abstract
Spinel magnetic nanoparticle thin films were fabricated on high resistivity silicon substrates. TRL (through-reflect-line) calibration standards for CPW lines were fabricated on samples of high resistivity silicon with and without the magnetic thin film. Measurements show an increase of approximately 0.3 in the effective combined dielectric/magnetic constant for a film thickness of 100 nm. Capacitors are fabricated to determine the relative permittivity of the thin film. The relative permeability is determined using comparisons of the measured effective dielectric/magnetic constant with simulated data.
Keywords
Conductivity; Dielectric constant; Dielectric measurements; Dielectric substrates; Dielectric thin films; Fabrication; Magnetic films; Permittivity measurement; Silicon; Transmission lines; Magnetic Film; Spinel Magnetic;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.340859
Filename
4143265
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