• DocumentCode
    2219356
  • Title

    Optimal Microwave properties of thin BSTO films for high frequency applications

  • Author

    Tumarkin, A.V. ; Razumov, S.V. ; Gagarin, A.G. ; Kozyrev, A.B.

  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    1315
  • Lastpage
    1317
  • Abstract
    The influence of deposition parameters on microwave properties of BaxSr1-xTiO3 (BSTO) films deposited on alumina substrate has been investigated in a wide frequency range (1-30 GHz). The best combination of high tunability (n) and low losses (tan ¿) at room temperature was obtained for the 30% Ba content target. The best BSTO films exhibited n = 2.1 and tan¿=0.016 at 1 GHz and zero bias. This result is among the best reported for sputtered BSTO on alumina substrates.
  • Keywords
    Capacitors; Copper; Decision support systems; Electrodes; Frequency measurement; Loss measurement; Microwave measurements; Quadratic programming; Temperature distribution; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.340861
  • Filename
    4143267
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2219356