Title :
Optimal Microwave properties of thin BSTO films for high frequency applications
Author :
Tumarkin, A.V. ; Razumov, S.V. ; Gagarin, A.G. ; Kozyrev, A.B.
Abstract :
The influence of deposition parameters on microwave properties of BaxSr1-xTiO3 (BSTO) films deposited on alumina substrate has been investigated in a wide frequency range (1-30 GHz). The best combination of high tunability (n) and low losses (tan ¿) at room temperature was obtained for the 30% Ba content target. The best BSTO films exhibited n = 2.1 and tan¿=0.016 at 1 GHz and zero bias. This result is among the best reported for sputtered BSTO on alumina substrates.
Keywords :
Capacitors; Copper; Decision support systems; Electrodes; Frequency measurement; Loss measurement; Microwave measurements; Quadratic programming; Temperature distribution; Thickness measurement;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340861
