• DocumentCode
    2220023
  • Title

    Application of MEMS Technology to RF/Microwave Systems

  • Author

    De Los Santos, Héctor J.

  • Author_Institution
    NanoMEMS Research, LLC, P.O. Box 18614, Irvine, CA 92623-8614 USA, E-mail: nanomemsllc@aol.com
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    1439
  • Lastpage
    1442
  • Abstract
    Microelectromechanical Systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. We discuss the fundamentals of this exciting technology, potential pitfalls to be encountered and typical applications where MEMS is expected to make the greatest impact in RF/microwave circuits and systems. In particular, the ability of MEMS´ fabrication techniques to enhance the performance of passive components, e.g., capacitors, inductors, transmission lines, and switches, is addressed, and a number of potential wireless system opportunities, namely, wireless transceivers, routing networks, and tracking antennas for mobile multimedia communications, awaiting the maturation of MEMS, are discussed.
  • Keywords
    Circuits and systems; Distributed parameter circuits; Fabrication; Inductors; Microelectromechanical systems; Micromechanical devices; Microwave technology; Radio frequency; Switched capacitor networks; Wireless communication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.340892
  • Filename
    4143298