DocumentCode
2220023
Title
Application of MEMS Technology to RF/Microwave Systems
Author
De Los Santos, Héctor J.
Author_Institution
NanoMEMS Research, LLC, P.O. Box 18614, Irvine, CA 92623-8614 USA, E-mail: nanomemsllc@aol.com
fYear
2003
fDate
Oct. 2003
Firstpage
1439
Lastpage
1442
Abstract
Microelectromechanical Systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. We discuss the fundamentals of this exciting technology, potential pitfalls to be encountered and typical applications where MEMS is expected to make the greatest impact in RF/microwave circuits and systems. In particular, the ability of MEMS´ fabrication techniques to enhance the performance of passive components, e.g., capacitors, inductors, transmission lines, and switches, is addressed, and a number of potential wireless system opportunities, namely, wireless transceivers, routing networks, and tracking antennas for mobile multimedia communications, awaiting the maturation of MEMS, are discussed.
Keywords
Circuits and systems; Distributed parameter circuits; Fabrication; Inductors; Microelectromechanical systems; Micromechanical devices; Microwave technology; Radio frequency; Switched capacitor networks; Wireless communication;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.340892
Filename
4143298
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