Title :
Account and experimental researches of strain in square diaphragm [pressure sensors]
Author :
Gridchin, V.A. ; Grichenko, V.V. ; Lubimsky, V.M.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
The task of analysing the large deflections in a square diaphragm is solved. The analytical expressions for presence of deflections in a square diaphragm are assessed in view of deformation of the middle of a plane. The simple algorithms of defining a component tensor of strain are given. Good agreement between experimental and analytical results for the diaphragm are demonstrated. Nonlinear strain and relative changes of resistance of longitudinal and cross resistors on a diaphragm are calculated
Keywords :
electric sensing devices; pressure sensors; tensors; component tensor; cross resistors; deflections; deformation; longitudinal resistors; pressure sensors; square diaphragm; Anisotropic magnetoresistance; Capacitive sensors; Etching; Finite element methods; Jamming; Pressure control; Resistors; Silicon; Strain control; Tensile stress;
Conference_Titel :
Microwave Electronics: Measurements, Identification, Application Conference, 2001. MEMIA 2001
Conference_Location :
Novosibirsk
Print_ISBN :
0-7803-6743-X
DOI :
10.1109/MEMIA.2001.982336
