Efficient full-wave simulation in layered, lossy media

We describe a fast integral equation-based method for full-wave extraction in layered media. The method uses a combination of the fast integral equation solver IES³, layered Green´s functions, and a formulation that gives a well-conditioned linear system even in the “electrically-small” regime (i.e., when circuit structures are a fraction of the wavelength of light). The overall approach gives O(NlogN) complexity, where N is the number of panels in a discretization of the conductor surfaces. We apply our method to the simulation of an integrated inductor on a lossy CMOS substrate and compare the results to measurement