Title :
Critical density effects in sub-picosecond laser-ablation of silicon by plasma absorption ion-energy spectroscopy
Author :
Zhang, Z. ; VanRompay, P.A. ; Yalisove, S.M. ; Mourou, G.A. ; Pronko, P.P.
Author_Institution :
Center for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Summary form only given. This paper discusses the efficiency of absorption of sub-picosecond laser pulses during the formation of ablation plasma plumes from a silicon solid target. Such plasmas are normally used to fabricate thin films on a heated substrate. Properties of the plasma such as temperature, density energy, and species can affect growth mechanisms and the final film quality. The energy and the associated flux density in ablation plasmas are a function of the percentage of energy extracted from the incoming laser pulse at the target. It is shown in this work that the critical density condition of a plasma initially formed by a single pulse can be subsequently modified by the pumping action of a secondary time-delayed pulse.
Keywords :
elemental semiconductors; laser ablation; plasma density; plasma production by laser; semiconductor plasma; silicon; Rutherford backscattering; Si; ablation plasma plumes; critical density effects; electron-hole solid-state plasma; electron-lattice shock coupling; final film quality; flux density; initial overdense plasma; low fluence ablation process; plasma absorption ion-energy spectroscopy; secondary time-delayed pulse; self-similar model calculation; solid target; subpicosecond laser-ablation; total ion yield; Laser ablation; Plasma generation; Plasma properties; Semiconductor plasmas; Silicon;
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2002. QELS '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-708-3
DOI :
10.1109/QELS.2002.1031072