Title :
Nano-Porous Silicon antireflection coatings for microlens application
Author :
James, T.D. ; Milne, J.S. ; Keating, A.J. ; Parish, G. ; Musca, C.A. ; Dell, J.M. ; Faraone, L.
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Western Australia Univ., Crawley, WA
Abstract :
Nano-porous silicon is investigated as antireflection coating for silicon microlenses. The effect of non-planar silicon surfaces on nano-porous silicon thin film uniformity is examined. V-groves were micromachined in [100] orientated silicon and subsequently anodised in a HF solution to produce nano-porous silicon. The results show for nano-porous silicon fabricated on heavily doped p-type material the electric field has a negligible effect on the uniformity. The orientation of the anodised crystal planes does affect both the nano-porous silicon morphology and anodisation rate. A high quality nano-porous silicon antireflection coating on a planar surface is also demonstrated.
Keywords :
antireflection coatings; hydrogen compounds; microlenses; micromachining; nanoporous materials; silicon; HF; V-groves; anodised crystal planes; antireflection coatings; micromachining; nanoporous silicon; nonplanar silicon surfaces; silicon microlenses; Coatings; Fabrication; Infrared detectors; Lenses; Microoptics; Mirrors; Optical arrays; Sensor arrays; Silicon; Surface morphology;
Conference_Titel :
Nanoscience and Nanotechnology, 2006. ICONN '06. International Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
1-4244-0452-5
Electronic_ISBN :
1-4244-0452-5
DOI :
10.1109/ICONN.2006.340645
