DocumentCode
2223715
Title
Near-field scanning optical lithography of PPV for functional devices
Author
Cotton, Daniel V. ; Fell, Christopher J. ; Duck, Benjamin C. ; Downs, Jordan L. ; Dastoor, Paul C.
Author_Institution
Sch. of Math. & Phys. Sci., Newcastle Univ., Callaghan, NSW
fYear
2006
fDate
3-7 July 2006
Abstract
We show here for the first time a device manufactured by the technique of near-field scanning optical lithography (NSOL) functioning as an optical device. The technique of NSOL is used to manufacture an optical transmission phase grating (or phase mask) of the semi-conducting polymer poly(p-phenylene vinylene) (PPV), this was done as a proof of concept for device manufacture by this method. Structures on this scale are of interest for integrated optical devices. The phase mask was characterised using AFM and SEM and examined in the context of how well a diffraction pattern matches with theoretical calculations. Some calculations were performed to determine the feasibility of using a similar grating as a component of an all-optical switch. The ablation threshold of PPV was determined to complement the calculations.
Keywords
atomic force microscopy; conducting polymers; diffraction gratings; integrated optics; masks; photolithography; scanning electron microscopy; AFM; PPV; SEM; ablation threshold; all-optical switch; diffraction pattern; functional devices; integrated optical devices; near-field scanning optical lithography; optical transmission phase grating; phase mask; poly(p-phenylene vinylene); semiconducting polymer; Gratings; Holography; Lithography; Manufacturing; Optical devices; Optical films; Optical filters; Optical interferometry; Optical polymers; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoscience and Nanotechnology, 2006. ICONN '06. International Conference on
Conference_Location
Brisbane, Qld.
Print_ISBN
1-4244-0452-5
Electronic_ISBN
1-4244-0452-5
Type
conf
DOI
10.1109/ICONN.2006.340676
Filename
4143456
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