Title :
SEM Characterization of Nanodevices and Nanomaterials
Author :
Drouin, Dominique ; Pauc, Nicolas ; Phillips, Matthew ; Poissant, Patrick ; Delample, Vincent ; Souifi, Abdelkader ; Aimez, Vincent ; Beauvais, Jacques
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. de Sherbrooke, Que.
Abstract :
The scanning electron microscope (SEM) can be used to study and characterize a wide variety of materials used in nanoelectronic and photonic applications. Several different techniques make use of this versatile tool. These include voltage contrast in secondary electron imaging, charge collection for semiconductor samples and cathodoluminescence. These techniques are important in device nanofabrication process development and nanomaterials characterization
Keywords :
nanoelectronics; nanostructured materials; scanning electron microscopy; SEM; cathodoluminescence; charge collection; nanodevices characterization; nanofabrication process development; nanomaterials characterization; scanning electron microscope; secondary electron imaging; voltage contrast; Atomic force microscopy; Electrodes; Gallium nitride; Instruments; Nanomaterials; Nanoscale devices; Optical imaging; Plasma measurements; Scanning electron microscopy; Voltage;
Conference_Titel :
Nanoscience and Nanotechnology, 2006. ICONN '06. International Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
1-4244-0453-3
Electronic_ISBN :
1-4244-0453-3
DOI :
10.1109/ICONN.2006.340688
