Title :
Fabrication of transparent electrodes from AZO nanoparticles by pulsed laser annealing
Author :
Chen, Kun-Tso ; Lin, Yu-Hsuan ; Ho, Jeng-Rong ; Liu, Sung-Ho ; Chen, Chun-Ming
Author_Institution :
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
Abstract :
We report on an approach for fabricating transparent electrodes on a plastic substrate by annealing AZO nanoparticles using a pulsed UV laser. For the resulting AZO film, the resistivity is 7.6 × 10-2 Ω-cm and the transmittance is over 80% within the wavelength from 400 to 800 nm. This method is straightforward and executable in the ambient environment and at room temperature.
Keywords :
II-VI semiconductors; aluminium; electrical resistivity; electrodes; laser beam annealing; nanoparticles; semiconductor thin films; ultraviolet spectra; visible spectra; wide band gap semiconductors; zinc compounds; AZO nanoparticles; ZnO:Al; pulsed UV laser; pulsed laser annealing; resistivity; resistivity 0.076 ohmcm; transmittance; transparent electrodes; Annealing; Conductivity; Films; Lasers; Nanoparticles; Pulsed laser deposition; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
