DocumentCode
2224736
Title
Selective tuning of silicon photonic crystal cavities via laser-assisted local oxidation
Author
Zheng, J. ; Chen, C.J. ; McMillan, J.F. ; Yu, M. ; Lo, G.-Q. ; Kwong, D.-L. ; Wong, C.W.
Author_Institution
Opt. Nanostmctures Lab., Columbia Univ., New York, NY, USA
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >;2nm. The quality factor remains >;200,000.
Keywords
Q-factor; elemental semiconductors; laser materials processing; nanophotonics; optical tuning; oxidation; photonic crystals; resonance; silicon; spectral line shift; Si; blue shift; laser-assisted local oxidation; photonic crystal cavity; quality factor; selective tuning; ultrahigh Q nanocavity resonance tuning; wavelength 532 nm; Cavity resonators; Laser tuning; Optical waveguides; Oxidation; Photonic crystals; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950013
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