• DocumentCode
    2224736
  • Title

    Selective tuning of silicon photonic crystal cavities via laser-assisted local oxidation

  • Author

    Zheng, J. ; Chen, C.J. ; McMillan, J.F. ; Yu, M. ; Lo, G.-Q. ; Kwong, D.-L. ; Wong, C.W.

  • Author_Institution
    Opt. Nanostmctures Lab., Columbia Univ., New York, NY, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >;2nm. The quality factor remains >;200,000.
  • Keywords
    Q-factor; elemental semiconductors; laser materials processing; nanophotonics; optical tuning; oxidation; photonic crystals; resonance; silicon; spectral line shift; Si; blue shift; laser-assisted local oxidation; photonic crystal cavity; quality factor; selective tuning; ultrahigh Q nanocavity resonance tuning; wavelength 532 nm; Cavity resonators; Laser tuning; Optical waveguides; Oxidation; Photonic crystals; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950013