Title :
Selective tuning of silicon photonic crystal cavities via laser-assisted local oxidation
Author :
Zheng, J. ; Chen, C.J. ; McMillan, J.F. ; Yu, M. ; Lo, G.-Q. ; Kwong, D.-L. ; Wong, C.W.
Author_Institution :
Opt. Nanostmctures Lab., Columbia Univ., New York, NY, USA
Abstract :
Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >;2nm. The quality factor remains >;200,000.
Keywords :
Q-factor; elemental semiconductors; laser materials processing; nanophotonics; optical tuning; oxidation; photonic crystals; resonance; silicon; spectral line shift; Si; blue shift; laser-assisted local oxidation; photonic crystal cavity; quality factor; selective tuning; ultrahigh Q nanocavity resonance tuning; wavelength 532 nm; Cavity resonators; Laser tuning; Optical waveguides; Oxidation; Photonic crystals; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
