Adaptive Sliding Motion Tracking Control of Piezo-Driven Flexure-Based Mechanism

This paper presents an adaptive sliding motion tracking control methodology for a flexure-based micro/nano manipulator driven by a piezoelectric actuator. This control methodology is proposed for tracking desired motion trajectories in view of the problems of unknown or uncertain system parameters, non-linearities including the hysteresis effect, and external disturbances in the system. In this paper, a lumped parameter dynamic model is established for the formulation of the proposed control methodology. The convergence of the position and velocity tracking errors to zero is assured by the approach in the presence of the aforementioned conditions. The stability of the closed-loop system is proven theoretically, and a precise tracking performance in following a desired motion trajectory is demonstrated in the experimental study.