Development of capacitance type micro encoder

Author

Kuribayashi, Katsutoshi ; Shimizu, Seiji ; Horikawa, Masayoshi ; Taniguchi, Takao

Author_Institution

Yamaguchi Univ., Ube, Japan

fYear

1993

fDate

15-19 Nov 1993

Firstpage

1754

Abstract

Micro sensors are key devices for developing miniature sized micromachines which are topically required to be developed. In this paper, micro rotary and linear encoders using electrical capacitance and a signal processing circuit for the encoders are proposed. Capacitance change occurs according to the rotation of two micro discs whose surfaces are patterned by metal thin film. This type of micro encoder has the advantages of 1) easy micronization by using sputtering method and photolithography, 2) robust against electrical noise, 3) without temperature compensation. Trial productions were made and the characteristics were tested

Keywords

capacitance; electric sensing devices; encoding; micromechanical devices; signal processing; signal processing equipment; capacitance type micro encoder; electrical noise robustness; metal thin film; micro discs; micro linear encoders; micro rotary encoders; micro sensors; micromachines; photolithography; signal processing circuit; sputtering; temperature invariance; Capacitance; Circuit noise; Lithography; Noise robustness; Production; Signal processing; Sputtering; Temperature; Testing; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics, Control, and Instrumentation, 1993. Proceedings of the IECON '93., International Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-0891-3

Type

conf

DOI

10.1109/IECON.1993.339339

Filename

339339