Title :
Proceedings of International Solid State Sensors and Actuators Conference (Transducers ´97)
Abstract :
The folowing topics were dealt with: actuators; resonant structures; microchemical reactors; process technology; optical microsystems; force and flow sensors; immunosensors; packaging technology; intelligent systems; magnetic sensors; bioanalytical systems; mechanical properties; acoustic devices; analytical systems; bonded and HARM technology; micropumps; AFM and related sensors; gas sensors; bulk micromachining; inertial sensors; biosensors; telemetry systems; device modeling; microfluidic devices; vibratory gyroscopes; chemical sensors; data storage; whole cell systems; artificial noses; accelerometers; novel materials and processes; microrelays; physical sensors; ion sensors; pressure sensors
Keywords :
accelerometers; acoustic transducers; atomic force microscopy; biosensors; chemical sensors; flow measurement; fluidic devices; force measurement; gas sensors; gyroscopes; intelligent actuators; intelligent sensors; magnetic sensors; microactuators; micromachining; micromechanical resonators; micropumps; microsensors; optical elements; packaging; pressure sensors; telemetry; AFM; HARM technology; accelerometers; acoustic devices; actuators; analytical systems; artificial noses; bioanalytical systems; biosensors; bonded technology; bulk micromachining; chemical sensors; data storage; device modeling; flow sensors; force sensors; gas sensors; immunosensors; inertial sensors; intelligent systems; ion sensors; magnetic sensors; mechanical properties; microchemical reactors; microfluidic devices; micropumps; microrelays; optical microsystems; packaging technology; physical sensors; pressure sensors; process technology; resonant structures; telemetry systems; vibratory gyroscopes; whole cell systems;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL, USA
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635203
