DocumentCode
2226054
Title
True bulk GaN technology for high efficiency devices
Author
Bliss, David ; Wang, Buguo ; Mann, Matthew
Author_Institution
US Air Force Res. Lab., Hanscom AFB, MA, USA
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
3
Abstract
As GaN device technologies confront the need to increase yield and performance metrics, expected material improvements will come from the use of lattice-matched substrates. There is a growing interest in utilizing low-defect density GaN substrates for certain high performance applications. Manufacturers who make use of true bulk substrates will have the first opportunity to achieve the theoretically predicted performance and reliability for GaN-based devices. This paper will outline the progress of bulk GaN crystal growth techniques, and compare their various merits and deficiencies. Solvothermal growth, flux growth, and vapor phase growth are the main contenders that must prove their ability to provide high quality material consistently and at a competitive price. To validate their claims, we will discuss issues such as wafer purity, defect density, lattice bending, growth rate, and reproducibility.
Keywords
III-V semiconductors; bending; crystal growth from solution; crystal growth from vapour; gallium compounds; optical materials; vapour phase epitaxial growth; wide band gap semiconductors; GaN; bulk GaN device technologies; crystal growth techniques; defect density; flux growth; high performance applications; lattice bending; lattice-matched substrates; low-defect density GaN substrates; solvothermal growth; vapor phase growth; wafer purity; Crystals; Gallium nitride; Performance evaluation; Production; Substrates; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950066
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