DocumentCode
2226304
Title
Gradient-index adiabatic impedance matching (GRIN-AIM) antireflective diffractive optics
Author
Chang, Chih-Hao ; Dominguez-Caballero, Jose A. ; Choi, Hyungryul J. ; Barbastathis, George
Author_Institution
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
We have experimentally demonstrated suppression of reflection diffracted orders by at least 100× in a silicon grating by tapered nanostructures emulating adiabatic index matching. Novel fabrication using self-assembled nanospheres as lithographic mask was employed.
Keywords
antireflection coatings; diffraction gratings; gradient index optics; impedance matching; integrated optics; lithography; masks; nanophotonics; optical fabrication; reflectivity; self-assembly; Si; antireflective diffractive optics; gradient-index adiabatic impedance matching; lithographic mask; reflection diffracted orders; self-assembled nanospheres; silicon grating; tapered nanostructures; Diffraction gratings; Fabrication; Gratings; Nanostructures; Optics; Reflection; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950074
Link To Document