Applying the nanometer degree capacitance sensor to the super-high-precision measurement of roundness

The super-high-precision measurement of the shape error of a gyroscopic specimen is very important. This paper puts forward a systematic analysis method and a compensation technique, which take the sensor, other measuring chains, measuring state and environment as a system. Every error factor of the system can be analysed and compensated systematically. The authors of this paper also complete the practical analysis and a compensation experiment. The experiment shows that the compensation results of the above method are remarkable