Thin dielectric resonators for microwave characterization of films and substrates

Thin dielectric resonator consisting only of a low-loss dielectric substrate and a deposited film is proposed for the electrode-free microwave characterization of thin films and substrates. In-plane microwave dielectric parameters of a number of substrates and thin films were measured in a broad temperature range using the TE_01δ resonance mode. Dielectric anomalies corresponding to the induced phase transitions were observed. The HE_11δ mode is proposed for the in-plane dielectric anisotropy characterization. The anisotropy of the (110) DyScO₃ substrate was measured.