Title :
Comparative analysis of characteristics of resonator sensors for SMM of semiconductors
Author :
Gordienko, Y.E. ; Good, Y.I. ; Kamyshan, A.A. ; Larkin, S.Y.
Author_Institution :
Kharkiv Nat. Univ. of Radioelectron., Kharkiv, Ukraine
Abstract :
Analysis of dependence of quality factor of a storage part of widely used resonator sensors for scanning microwave microscopy (SMM) is performed. Analysis is carried out on the results of numerical estimates obtained by solving the problem of finding the resonance oscillations using the finite element method. A comparison with estimates from the approximate formulas and experimental results is realized.
Keywords :
Q-factor; finite element analysis; microwave detectors; microwave measurement; microwave resonators; scanning probe microscopy; semiconductor materials; finite element method; frequency 8 GHz; numerical estimates; quality factor dependence analysis; resonance oscillations; resonator sensor characteristics; scanning microwave microscopy; scanning probe microscopy; semiconductor materials; Capacitive sensors; Cavity resonators; Materials; Microwave imaging; Q factor; Semiconductor device measurement;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4577-0883-1
