Title :
Simultaneous determination of electrical conductivity and thickness of the semiconductor layers in the dielectric-semiconductor structures as per microwave reflection spectra
Author :
Usanov, D.A. ; Postelga, A.E.
Author_Institution :
Saratov State Univ. n.a. N.G. Chernyshevskiy, Saratov, Russia
Abstract :
The present paper confirms possibility of determination of conductivity and thickness of semiconductor layers as per results of measurements of frequency dependence of a reflection factor of electromagnetic microwave radiation at different temperature values. The appropriate inverse problem solution technique is proposed.
Keywords :
dielectric materials; electrical conductivity; electromagnetic wave reflection; inverse problems; microwave spectra; semiconductor materials; dielectric-semiconductor structures; electrical conductivity; electromagnetic microwave radiation; frequency dependence measurement; inverse problem solution technique; microwave reflection spectra; reflection factor; semiconductor layer thickness; Conductivity; Electromagnetics; Electronic mail; Microwave measurements; Microwave theory and techniques; Reflection; Temperature measurement;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4577-0883-1
