مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2227794

Title :

Research of SI for VHF-devices

Author :

Timoshenkov, S.P. ; Minaev, Vladimir S. ; Kalugin, V.V. ; Klochko, A.V. ; Kalugina, I.V.

Author_Institution :

Moscow Inst. of Electron. Technol. (Tech. Univ.), Moscow, Russia

fYear :

2011

fDate :

12-16 Sept. 2011

Firstpage :

703

Lastpage :

704

Abstract :

Results of research of Si for VHF devices are submitted.

Keywords :

VHF devices; elemental semiconductors; silicon; Si; VHF devices; silicon; Amorphous silicon; Annealing; Crystals; Films; Minutes; Polymers;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference

Conference_Location :

Sevastopol

Print_ISBN :

978-1-4577-0883-1

Type :

conf

Filename :

6069116

Link To Document :