Development of LIGA-fabricated, self-priming, in-line gear pumps

Author

Dewa, Andrew S. ; Deng, Keren ; Ritter, Darren C. ; Bonham, Charles ; Guckel, Henry ; Massood-Ansari, Sombol

Author_Institution

MEMStek Products LLC, Vancouver, WA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

757

Abstract

This paper reports the development and characterization of the self-priming, magnetically-actuated, two-gear plastic pump which is fabricated by the sacrificial LIGA process. This positive displacement, in-line pump provides a flow rate of 350 μl/min at 5000 rpm, over 140 cm-H₂O (~2 psi) of head pressure and 28.8 cm-H₂O vacuum on the suction side for a single stage pump. It is the first non-diaphragm, microfabricated pump. A two stage in-line pump generated 533 mm-H₂O vacuum at its inlet (21" H₂O). This performance demonstrates a viable, microfabricated alternative to syringe pumps and compressed gas for moving fluids in micro-instrumentation

Keywords

X-ray lithography; electroforming; microactuators; micropumps; 2 psi; flow rate; head pressure; micro-instrumentation; nondiaphragm microfabricated pump; positive displacement in-line pump; sacrificial LIGA process; self-priming magnetically-actuated two-gear plastic pump; single stage pump; two stage in-line pump; vacuum; Fabrication; Gears; Instruments; Magnetic analysis; Magnetic heads; Micromechanical devices; Plastics; Pumps; Seals; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635210

Filename

635210