• DocumentCode
    2228196
  • Title

    Metallization on the basis of binary and ternary alloys for submicron elements of MEMS RF-microswitches formation

  • Author

    Chernykh, A.G. ; Tymoshchyk, A.S. ; Kotov, D.A. ; Yasunas, A.A.

  • Author_Institution
    Belarusian State Univ. of Inf. & Radio Electron., Minsk, Belarus
  • fYear
    2011
  • fDate
    12-16 Sept. 2011
  • Firstpage
    741
  • Lastpage
    742
  • Abstract
    Features of suspended elements of microme-chanical structures at transition to the submicron size formation are considered. It is shown, that suspended elements of micro-mechanical structures are exposed to the greatest deforming influence during sacrificial layer removing. The ways with the submicron sizes are offered.
  • Keywords
    deformation; metallisation; microswitches; suspensions; MEMS RF-microswitches; binary alloys; deformation; metallization; micromechanical structure; sacrificial layer removing; submicron element suspension; submicron size formation; ternary alloys; Electronic mail; Etching; Fuses; Informatics; Metallization; Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4577-0883-1
  • Type

    conf

  • Filename
    6069132
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2228196