DocumentCode
2228301
Title
The shuffle motor: a high force, high precision linear electrostatic stepper motor
Author
Tas, Niels ; Wissink, Jeroen ; Sander, Louis ; Lammerink, Theo ; Elwenspoek, Miko
Author_Institution
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
777
Abstract
The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40 V clamping voltage and 25 V actuator voltage
Keywords
electrostatic devices; elemental semiconductors; micromachining; micromotors; semiconductor technology; silicon; stepping motors; 25 V; 40 V; 85 nm; Si; actuator voltage; clamping voltage; driving voltage; linear electrostatic stepper motor; maximum load; maximum produced force; mechanical transformation; optimal geometry; polysilicon; positioning; shuffle motor; step size; Actuators; Clamps; Electrostatics; Forward contracts; Friction; Micromachining; Micromotors; Solid modeling; Transducers; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635215
Filename
635215
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