Title :
A linear stepping actuator in surface micromachining technology for low voltages and large displacements
Author :
Baltzer, M. ; Kraus, Th ; Obermeier, E.
Author_Institution :
Mircosensor & Microactuator Technol. Center, Tech. Univ. Berlin, Germany
Abstract :
This paper reports on a surface micromachined linear stepping motor for low voltages between 15-30 V, using the attractive electrostatic forces between the drive electrodes. The maximum stepping width is 3 μm. Two types of actuators have been designed, fabricated and successfully tested, yielding accurate displacements of more than 100 μm
Keywords :
elemental semiconductors; microactuators; micromotors; silicon; stepping motors; 15 to 30 V; 3 mum; Si; displacements; drive electrodes; electrostatic forces; linear stepping actuator; linear stepping motor; polysilicon; surface micromachining technology; Capacitors; Electrodes; Electrostatic actuators; Fingers; Grippers; Hydraulic actuators; Low voltage; Micromachining; Stators; Suspensions;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635216
