DocumentCode
2228323
Title
A linear stepping actuator in surface micromachining technology for low voltages and large displacements
Author
Baltzer, M. ; Kraus, Th ; Obermeier, E.
Author_Institution
Mircosensor & Microactuator Technol. Center, Tech. Univ. Berlin, Germany
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
781
Abstract
This paper reports on a surface micromachined linear stepping motor for low voltages between 15-30 V, using the attractive electrostatic forces between the drive electrodes. The maximum stepping width is 3 μm. Two types of actuators have been designed, fabricated and successfully tested, yielding accurate displacements of more than 100 μm
Keywords
elemental semiconductors; microactuators; micromotors; silicon; stepping motors; 15 to 30 V; 3 mum; Si; displacements; drive electrodes; electrostatic forces; linear stepping actuator; linear stepping motor; polysilicon; surface micromachining technology; Capacitors; Electrodes; Electrostatic actuators; Fingers; Grippers; Hydraulic actuators; Low voltage; Micromachining; Stators; Suspensions;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635216
Filename
635216
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