• DocumentCode
    2228405
  • Title

    Nanoporous silicon combustion process for mems

  • Author

    Lazarouk, S.K. ; Dolbik, A.V. ; Labunov, V.A.

  • Author_Institution
    Belarusian State Univ. of Inf. & Radioelectron., Minsk, Belarus
  • fYear
    2011
  • fDate
    12-16 Sept. 2011
  • Firstpage
    761
  • Lastpage
    762
  • Abstract
    Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the combustion process for jet-propulsion microsystems. The pendulum systems with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range of 1-5 mN·s.
  • Keywords
    combustion; elemental semiconductors; nanofabrication; nanoporous materials; silicon; MEMS; Si; combustion process; jet-propulsion microsystems; nanoporous silicon combustion; nanostructured porous silicon; silicon chip; solid state oxidants; Combustion; Explosions; Hafnium; Ignition; Silicon; Solids;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4577-0883-1
  • Type

    conf

  • Filename
    6069140
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2228405