Title :
Characteristics of leaky surface acoustic waves propagating along liquid/layered-substrates and their application to liquid sensor
Author :
Furukawa, S. ; Nomura, Tadahiro ; Yasuda, Toshiyuki ; Nishimura, Ryota ; Hiramatsu, Toshiyuki ; Tamura, Masato
Author_Institution :
Dept. of Comput. Sci. & Electron., Kyushu Inst. of Technol., Fukuoka
fDate :
31 Oct-3 Nov 1993
Abstract :
We propose SiO2 (fused silica)/(36°rot.Y-X)LiNbO 3 substrate for a viscosity sensor, in which the shear horizontal (SH) component becomes larger than that of the case without SiO2. For glycerin/SiO2 (40 μm)/LiNbO3 the loss due to the viscosity of glycerin is four times larger than that for glycerin/LiNbO3 (30 MHz). Moreover, we show that the SiO2/(128°rot.Y-X)LiNbO3 structure is available as a liquid sensor, although the LiNbO3 substrate (128°rot.Y cut) itself has a small SH component. The origin of the large SH component in the layered substrates is discussed on the basis of the boundary conditions at the interface
Keywords :
electric sensing devices; piezoelectric thin films; surface acoustic wave devices; ultrasonic transducers; viscosity measurement; viscosity of liquids; 30 MHz; SiO2-LiNbO3; SiO2/LiNbO3 substrate; Y-X cut; fused silica; glycerin/SiO2/LiNbO3; leaky surface acoustic wave propagation; liquid/layered-substrates; viscosity sensor; Acoustic propagation; Acoustic sensors; Acoustic waves; Boundary conditions; Liquids; Propagation losses; Silicon compounds; Substrates; Surface acoustic waves; Viscosity;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339469
