DocumentCode
22289
Title
Nanometric Metal-Film Thickness Measurement Based on a Planar Spiral Coils Stack
Author
Vargas-Estevez, Carolina ; Robaina, Roberto R. ; Perez del Real, Rafael ; Plaza, Jose A.
Author_Institution
Micro & Nanosyst. Dept., Inst. de Microelectron. de Barcelona, Cerdanyola del Valles, Spain
Volume
14
Issue
2
fYear
2015
fDate
Mar-15
Firstpage
297
Lastpage
303
Abstract
This paper presents a sensor composed of a differential arrangement of coils capable of measuring nanometric metallic film thickness. Experimental results achieved aluminum thickness measurements as low as 20 nm with a sensitivity of 3.8 mV/nm. This makes this sensor a flexible, nondestructive, and cheap alternative for metallic thickness measurement down to nanometric scale.
Keywords
aluminium; coils; metallic thin films; nanostructured materials; sensors; thickness measurement; Al; aluminum thickness measurements; differential coil arrangement; nanometric metal-film thickness measurement; planar spiral coil stack; size 20 nm; Coils; Current measurement; Films; Frequency measurement; Optical interferometry; Thickness measurement; Voltage measurement; Eddy current; electromagnetic sensor; metal-film thickness; planar inductor; spiral inductor;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2015.2392794
Filename
7010979
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