Title :
The model of the optical tomographic Microscope resolution
Author :
Danilova, T.V. ; Volkov, Y.P. ; Manturov, A.O. ; Yudakov, M.A.
Author_Institution :
Saratov State Tech. Univ., Saratov, Russia
Abstract :
In this work the results of numerical estimations of the Optical Scanning Microscope resolution with tomography method reconstruction of Object Image are presented. Using the Mie theory methods, we analyze the scattering of the illuminated light beam and obtain the resolution limit estimations for UV light and soft X-ray illumination sources. As it is shown the spatial resolution of possible Optical Scanning Microscope can achieve 40-60 nm limit at UV illumination source (λ=206 nm).
Keywords :
electromagnetic wave scattering; image processing; image reconstruction; optical microscopes; optical tomography; Mie theory methods; UV illumination source; UV light; illuminated light beam; object image; optical scanning microscope resolution; optical tomographic microscope resolution; soft X-ray illumination sources; wavelength 40 nm to 60 nm; Microscopy; Optical imaging; Optical microscopy; Optical reflection; Optical scattering; Spatial resolution;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4577-0883-1
