DocumentCode
2229296
Title
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop [front matter]
fYear
1993
fDate
18-19 Oct. 1993
Abstract
Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original conference proceedings.
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Conference_Location
Boston, MA
Type
conf
DOI
10.1109/ASMC.1993.682457
Filename
682457
Link To Document