Title :
Strain-induced self-rolling of semiconductor membranes: Effect of geometry, energetics, and kinetics
Author :
Chun, Ik Su ; Challa, Archana ; Derickson, Brad ; Hsia, K. Jimmy ; Li, Xiuling
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
Semiconductor micro- and nanotubes can be formed by strain-induced self-rolling of membranes. The geometry effect on the final rolling direction of InxGa1-xAs-GaAs membranes are systematically studied both experimentally and by the finite element method.
Keywords :
III-V semiconductors; deformation; finite element analysis; gallium arsenide; indium compounds; membranes; nanofabrication; nanophotonics; rolling; semiconductor nanotubes; InxGa1-xAs-GaAs; finite element method; geometry effect; rolling direction; semiconductor membranes; semiconductor microtubes; semiconductor nanotubes; strain-induced self-rolling; Electron tubes; Epitaxial growth; Etching; Finite element methods; Geometry; Nanotubes; Strain;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
