DocumentCode
2230031
Title
Digital planar holograms fabricated by step and repeat UV nanoimprint lithography: From spectrometer chip to higher power laser diodes
Author
Peroz, C. ; Dhuey, S. ; Goltsov, A. ; Harteneck, B. ; Ivonin, I. ; Svetikov, V. ; Babin, S. ; Cabrini, S. ; Yankov, V.
Author_Institution
aBeam Technol., Castro Valley, CA, USA
fYear
2011
fDate
1-6 May 2011
Firstpage
1
Lastpage
2
Abstract
The fabrication of digital planar holograms by Step and Repeat UV nanoimprint lithography is reported. It opens a route for commercial development of new nanophotonic devices based on digital planar holography. Two first applications to be demonstrated are the high resolution spectrometer chips and the enhancement of brightness and power of laser diodes.
Keywords
holography; nanolithography; nanophotonics; optical fabrication; semiconductor lasers; soft lithography; ultraviolet lithography; ultraviolet spectrometers; UV nanoimprint lithography; brightness; digital planar holograms; digital planar holography; higher power laser diodes; nanophotonics; spectrometer chip; Brightness; Diode lasers; Holography; Nanoscale devices; Optical device fabrication; Scanning electron microscopy; integrated optics devices; laser; nanofabrication; nanoimprint; spectroscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-4577-1223-4
Type
conf
Filename
5950225
Link To Document