Title :
Electromagnetically driven microvalve fabricated in silicon
Author :
Meckes, Andreas ; Behrens, Jörg ; Benecke, Wolfgang
Author_Institution :
Inst. for Microsensors, Acuators & Syst., Bremen Univ., Germany
Abstract :
This paper reports on a microvalve designed for the use with gaseous media and fabricated in silicon. The focus is on the functional part, the membrane plus valve seat. The membrane to switch the valve between open and closed position is designed having a low spring constant. So only little of the available force is needed for deflection and most of it remains for switching against the load (air pressure). This is shown by FEM simulation (ANSYS 5.2, 5.3). Due to the special design of the valve, packaging as a standalone device as well as full integration into a microsystem is possible
Keywords :
electromagnetic devices; electromagnetic forces; encapsulation; finite element analysis; membranes; microactuators; micromachining; semiconductor device packaging; silicon; valves; FEM simulation; Si; Si fabrication; electromagnetically driven microvalve; gaseous media; low spring constant; membrane; microsystem integration; packaging; switching; valve seat; Actuators; Biomembranes; Coils; Electromagnetic forces; Gold; Microvalves; Permanent magnets; Silicon; Switches; Valves;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635227
