• DocumentCode
    2230498
  • Title

    Theoretical and experimental characterization of fully metal coated scanning near-field optical microscopy SiO/sub 2/ tips

  • Author

    Vaccaro, L. ; Aeschimann, L. ; Akiyama, T. ; Eckert, R. ; Heinzelmann, H. ; de Rooij, N.F. ; Staufer, U. ; Herzig, H.P.

  • Author_Institution
    Group of Appl. Opt. Inst. of Microtechnology, Neuchatel Univ., Switzerland
  • fYear
    2002
  • fDate
    20-23 Aug. 2002
  • Firstpage
    7
  • Lastpage
    8
  • Abstract
    In spite of the considerable progress achieved in fabricating scanning near-field optical microscopy (SNOM) probes, the process to prepare smooth tip surfaces with aperture sizes under 100 nm is still expensive and time consuming. Recently, silicon cantilever-based SNOM probes with aluminum-coated quartz (fused silica) tips have been batch fabricated using micro machining technology. The tip apex is fully covered with a metal layer in the range of 60 nm thickness. It is the objective of this work to theoretically and experimentally elucidate the mechanism responsible for the light transmission through these novel probes.
  • Keywords
    near-field scanning optical microscopy; silicon compounds; Al; SiO/sub 2/; aluminum coating; batch fabrication; fused silica tip; light transmission; metal coated SiO/sub 2/ tip; micromachining technology; quartz tip; scanning near-field optical microscopy; silicon cantilever; Apertures; Coatings; Helium; Machining; Optical microscopy; Optical polarization; Optical scattering; Optical surface waves; Probes; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
  • Conference_Location
    Lugano, Switzerland
  • Print_ISBN
    0-7803-7595-5
  • Type

    conf

  • DOI
    10.1109/OMEMS.2002.1031417
  • Filename
    1031417