DocumentCode
2230498
Title
Theoretical and experimental characterization of fully metal coated scanning near-field optical microscopy SiO/sub 2/ tips
Author
Vaccaro, L. ; Aeschimann, L. ; Akiyama, T. ; Eckert, R. ; Heinzelmann, H. ; de Rooij, N.F. ; Staufer, U. ; Herzig, H.P.
Author_Institution
Group of Appl. Opt. Inst. of Microtechnology, Neuchatel Univ., Switzerland
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
7
Lastpage
8
Abstract
In spite of the considerable progress achieved in fabricating scanning near-field optical microscopy (SNOM) probes, the process to prepare smooth tip surfaces with aperture sizes under 100 nm is still expensive and time consuming. Recently, silicon cantilever-based SNOM probes with aluminum-coated quartz (fused silica) tips have been batch fabricated using micro machining technology. The tip apex is fully covered with a metal layer in the range of 60 nm thickness. It is the objective of this work to theoretically and experimentally elucidate the mechanism responsible for the light transmission through these novel probes.
Keywords
near-field scanning optical microscopy; silicon compounds; Al; SiO/sub 2/; aluminum coating; batch fabrication; fused silica tip; light transmission; metal coated SiO/sub 2/ tip; micromachining technology; quartz tip; scanning near-field optical microscopy; silicon cantilever; Apertures; Coatings; Helium; Machining; Optical microscopy; Optical polarization; Optical scattering; Optical surface waves; Probes; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031417
Filename
1031417
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