Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch

Author

Sawada, R. ; Yamaguchi, J. ; Higurashi, E. ; Shimizu, A. ; Yamamoto, T. ; Takeuchi, N. ; Uenishi, Y.

Author_Institution

NTT Telecommun. Energy Labs., NTT Corp., Atsugi, Japan

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

11

Lastpage

12

Abstract

Packaged large scale 1024 ch (32/spl times/32) mirror array switch module is presented for an optical cross-connect utilizing two-axis mirrors for beam steering. Besides being small, only 170/spl times/130 mm in size, the mirror array features a highly stable switching characteristics because of a tough mirror support and high-aspect-ratio torsion spring, very small warpage of ten nanometer order, and low applied voltage.

Keywords

beam steering; electrodes; elemental semiconductors; micromirrors; optical arrays; optical switches; silicon; torsion; 3D cross-connect switch; MEMS mirror array; Si; Si single crystal; beam steering; high-aspect ratio torsion spring; terraced electrode; Beam steering; Electrodes; Large-scale systems; Low voltage; Micromechanical devices; Mirrors; Optical arrays; Optical switches; Packaging; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031419

Filename

1031419