Title :
Single Si crystal 1024 ch MEMS mirror based on terraced electrodes and a high-aspect ratio torsion spring for 3-D cross-connect switch
Author :
Sawada, R. ; Yamaguchi, J. ; Higurashi, E. ; Shimizu, A. ; Yamamoto, T. ; Takeuchi, N. ; Uenishi, Y.
Author_Institution :
NTT Telecommun. Energy Labs., NTT Corp., Atsugi, Japan
Abstract :
Packaged large scale 1024 ch (32/spl times/32) mirror array switch module is presented for an optical cross-connect utilizing two-axis mirrors for beam steering. Besides being small, only 170/spl times/130 mm in size, the mirror array features a highly stable switching characteristics because of a tough mirror support and high-aspect-ratio torsion spring, very small warpage of ten nanometer order, and low applied voltage.
Keywords :
beam steering; electrodes; elemental semiconductors; micromirrors; optical arrays; optical switches; silicon; torsion; 3D cross-connect switch; MEMS mirror array; Si; Si single crystal; beam steering; high-aspect ratio torsion spring; terraced electrode; Beam steering; Electrodes; Large-scale systems; Low voltage; Micromechanical devices; Mirrors; Optical arrays; Optical switches; Packaging; Springs;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031419
