Title :
Development of a low-cost 8/spl times/8 optical switch using micro hot embossing
Author :
Shan, X.C. ; Maeda, R.
Author_Institution :
MES, Agency of Ind. Sci. & Technol., Ibaraki, Japan
Abstract :
An 8/spl times/8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.
Keywords :
electrostatic actuators; forming processes; micromirrors; microswitches; optical communication equipment; optical switches; 8/spl times/8 optical switch; Si; electrostatic force; grooves; input fibers; micro hot embossing; micro-forming technologies; optical networks; output fibers; polymer material; Assembly; Costs; Electrostatics; Embossing; Etching; Optical design; Optical fiber devices; Optical materials; Optical switches; Polymers;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031424
