DocumentCode
2230685
Title
Development of a low-cost 8/spl times/8 optical switch using micro hot embossing
Author
Shan, X.C. ; Maeda, R.
Author_Institution
MES, Agency of Ind. Sci. & Technol., Ibaraki, Japan
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
21
Lastpage
22
Abstract
An 8/spl times/8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.
Keywords
electrostatic actuators; forming processes; micromirrors; microswitches; optical communication equipment; optical switches; 8/spl times/8 optical switch; Si; electrostatic force; grooves; input fibers; micro hot embossing; micro-forming technologies; optical networks; output fibers; polymer material; Assembly; Costs; Electrostatics; Embossing; Etching; Optical design; Optical fiber devices; Optical materials; Optical switches; Polymers;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031424
Filename
1031424
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