Title :
Micro-fabricated system for wavelengths monitoring
Author :
Manzardo, O. ; Petremand, Y. ; Herzig, H.P. ; Noell, W. ; de Rooij, Nico
Author_Institution :
Inst. of Microtechnology, Neuchatel Univ., Switzerland
Abstract :
Presents a new design of a time-scanning Michelson interferometer realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology. The new design allows auto-calibration of the motion of the scanning mirror. The device is suitable for monitoring about 50 channels at the telecom wavelength (/spl lambda/=1.5/spl mu/m).
Keywords :
Michelson interferometers; micro-optics; micromachining; silicon-on-insulator; telecommunication channels; telecommunication equipment testing; 1.5 micron; MOEMS; SOI; Si; auto-calibration; micro-fabricated system; micro-machining; scanning mirror; telecom wavelength; time-scanning Michelson interferometer; wavelengths monitoring; Biomedical optical imaging; Lenses; Mirrors; Monitoring; Optical devices; Optical interferometry; Optical sensors; Resists; Silicon; Spectroscopy;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031425
