DocumentCode
2230726
Title
On the monte carlo simulation of optical MEMS components
Author
Badreldin, Tarek ; Saad, Tamer ; Khalil, Diaa
Author_Institution
Ain Shams University
fYear
2004
fDate
5-7 Sept. 2004
Firstpage
629
Lastpage
632
Keywords
Assembly; Micromechanical devices; Optical attenuators; Optical design; Optical design techniques; Optical devices; Optical filters; Optical sensors; Optical switches; Process design;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on
Print_ISBN
0-7803-8575-6
Type
conf
DOI
10.1109/ICEEC.2004.1374553
Filename
1374553
Link To Document