• DocumentCode
    2230726
  • Title

    On the monte carlo simulation of optical MEMS components

  • Author

    Badreldin, Tarek ; Saad, Tamer ; Khalil, Diaa

  • Author_Institution
    Ain Shams University
  • fYear
    2004
  • fDate
    5-7 Sept. 2004
  • Firstpage
    629
  • Lastpage
    632
  • Keywords
    Assembly; Micromechanical devices; Optical attenuators; Optical design; Optical design techniques; Optical devices; Optical filters; Optical sensors; Optical switches; Process design;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical, Electronic and Computer Engineering, 2004. ICEEC '04. 2004 International Conference on
  • Print_ISBN
    0-7803-8575-6
  • Type

    conf

  • DOI
    10.1109/ICEEC.2004.1374553
  • Filename
    1374553