Title :
CO/sub 2//H/sub 2/O gas sensor with a Fabry-Perot filter
Author :
Noro, M. ; Suzuki, K. ; Kishi, N. ; Hara, H. ; Watanabe, T. ; Iwaoka, H.
Author_Institution :
Yokogawa Electr. Corp., Nagano, Japan
Abstract :
An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for NDIR CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
Keywords :
Fabry-Perot resonators; gas sensors; infrared detectors; light absorption; micro-optics; microsensors; 2.5 to 4.5 micron; CO/sub 2/; Fabry-Perot filter; H/sub 2/O; MEMS; NDIR; electrostatically driven tunable filter; gas sensor; infrared absorption; nondispersive infrared measurement; Bonding; Fabry-Perot; Gas detectors; Lamps; Mirrors; Optical filters; Optical refraction; Optical sensors; Optical variables control; Pyroelectricity;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031427
