• DocumentCode
    2230764
  • Title

    Large k2 and good temperature stability for SAW on new double-rotated cut of α-quartz with gold film

  • Author

    Isobe, Atsuo ; Hikita, Masayuki ; Asai, Kikuo

  • Author_Institution
    Central Res. Lab., Hitachi Ltd., Tokyo
  • fYear
    1993
  • fDate
    31 Oct-3 Nov 1993
  • Firstpage
    323
  • Abstract
    LST-cut α-quartz offers good temperature stability and small propagation loss. It has been also observed that if thickness cannot be ignored compared with SAW wavelength, propagation loss increases. We investigated the relation between the rotation angles of LST-cut quartz and SAW propagation characteristics theoretically and experimentally. We found that if the thickness of Au film electrodes was optimized, ranges of double-rotation angles could exist, where the compatibility of both small propagation loss and zero temperature coefficient was achieved, The maximum value of their coupling factors was 0.5%, which is very large for α-quartz
  • Keywords
    gold; metallic thin films; quartz; surface acoustic waves; ultrasonic propagation; Au; Au film electrodes; LST-cut α-quartz; SAW propagation; SAW wavelength; SiO2; propagation loss; rotation angles; temperature coefficient; temperature stability; Artificial intelligence; Electrodes; Gold; Gratings; Propagation losses; Stability; Surface acoustic waves; Surface waves; Temperature; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    0-7803-2012-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1993.339563
  • Filename
    339563