DocumentCode
2230764
Title
Large k2 and good temperature stability for SAW on new double-rotated cut of α-quartz with gold film
Author
Isobe, Atsuo ; Hikita, Masayuki ; Asai, Kikuo
Author_Institution
Central Res. Lab., Hitachi Ltd., Tokyo
fYear
1993
fDate
31 Oct-3 Nov 1993
Firstpage
323
Abstract
LST-cut α-quartz offers good temperature stability and small propagation loss. It has been also observed that if thickness cannot be ignored compared with SAW wavelength, propagation loss increases. We investigated the relation between the rotation angles of LST-cut quartz and SAW propagation characteristics theoretically and experimentally. We found that if the thickness of Au film electrodes was optimized, ranges of double-rotation angles could exist, where the compatibility of both small propagation loss and zero temperature coefficient was achieved, The maximum value of their coupling factors was 0.5%, which is very large for α-quartz
Keywords
gold; metallic thin films; quartz; surface acoustic waves; ultrasonic propagation; Au; Au film electrodes; LST-cut α-quartz; SAW propagation; SAW wavelength; SiO2; propagation loss; rotation angles; temperature coefficient; temperature stability; Artificial intelligence; Electrodes; Gold; Gratings; Propagation losses; Stability; Surface acoustic waves; Surface waves; Temperature; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location
Baltimore, MD
Print_ISBN
0-7803-2012-3
Type
conf
DOI
10.1109/ULTSYM.1993.339563
Filename
339563
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