Title :
Fabrication of optical MEMS in sol-gel materials
Author :
Obi, S. ; Gale, M.T. ; Kuoni, A. ; Noell, W. ; de Rooij, N.
Author_Institution :
Centre Suisse d´Electronique et de Microtechnique SA, Zurich, Switzerland
Abstract :
A method for fabricating optical MEMS in sol-gel-materials is presented. The basic process involves deposition and patterning of a sacrificial spacer layer and a combined molding and photolithography step. The method described allows the fabrication of micromechanical elements incorporating micro-optical structures such as lenses (diffractive or refractive), gratings (for polarizers or resonant filters), waveguides or other micro-optical relief structures fabricated by UV-curing replication processes.
Keywords :
curing; micro-optics; moulding; optical fabrication; photolithography; sol-gel processing; UV curing replication process; diffractive lens; fabrication method; grating; micro-optical relief structure; micro-optical structure; micromechanical element; molding; optical MEMS; photolithography; polarizer; refractive lens; resonant filter; sacrificial spacer layer; sol-gel material; waveguide; Diffraction gratings; Lenses; Lithography; Micromechanical devices; Optical device fabrication; Optical diffraction; Optical filters; Optical materials; Optical refraction; Optical waveguides;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031432
