Fabrication of optical MEMS in sol-gel materials

Author

Obi, S. ; Gale, M.T. ; Kuoni, A. ; Noell, W. ; de Rooij, N.

Author_Institution

Centre Suisse d´Electronique et de Microtechnique SA, Zurich, Switzerland

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

39

Lastpage

40

Abstract

A method for fabricating optical MEMS in sol-gel-materials is presented. The basic process involves deposition and patterning of a sacrificial spacer layer and a combined molding and photolithography step. The method described allows the fabrication of micromechanical elements incorporating micro-optical structures such as lenses (diffractive or refractive), gratings (for polarizers or resonant filters), waveguides or other micro-optical relief structures fabricated by UV-curing replication processes.

Keywords

curing; micro-optics; moulding; optical fabrication; photolithography; sol-gel processing; UV curing replication process; diffractive lens; fabrication method; grating; micro-optical relief structure; micro-optical structure; micromechanical element; molding; optical MEMS; photolithography; polarizer; refractive lens; resonant filter; sacrificial spacer layer; sol-gel material; waveguide; Diffraction gratings; Lenses; Lithography; Micromechanical devices; Optical device fabrication; Optical diffraction; Optical filters; Optical materials; Optical refraction; Optical waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031432

Filename

1031432