Title :
Real time, software control of spring suspended micro-electro-mechanical (MEM) devices for precision optical positioning applications
Author :
Madanagopal, K.V. ; D´Andrea, R. ; Tien, N.C.
Author_Institution :
Bio-technology Dept., Cornell Univ., Ithaca, NY, USA
Abstract :
We report on the development of an instrumentation and control suite to perform closed loop, real time position control of spring suspended micro-electro-mechanical (MEM) devices. Software control of the MEM device compensates for any parameter variations that occur during processing and ensures device functionality.
Keywords :
closed loop systems; micro-optics; optical control; position control; real-time systems; closed-loop real-time software control; microelectromechanical device; optical positioning; spring suspension; Actuators; Application software; Computer errors; Damping; Error correction; Feedback; Fingers; Force control; Hardware; Springs;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031433
