Title :
Characteristics of micromachined switches at microwave frequencies
Author :
Goldsmith, C. ; Randall, J. ; Eshelman, S. ; Lin, T.H. ; Denniston, D. ; Chen, S. ; Norvell, B.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
Abstract :
This article reviews the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies. The construction and theory of operation of capacitive membrane switches is reviewed. Measurement and modeling of the electromechanical and microwave properties of these switches are presented. The inherent advantages of these switches relative to semiconductor switches is discussed.
Keywords :
electrostatic devices; membranes; micromachining; micromechanical devices; microwave devices; switches; capacitive membrane switches; electromechanical properties; micromachined switches; micromechanical membrane switches; microwave frequencies; Biomembranes; Contacts; Dielectric substrates; Electromechanical sensors; Fabrication; Integrated circuit technology; Micromechanical devices; Microwave frequencies; Sensor systems; Switches;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.511231
