DocumentCode
2230879
Title
Characteristics of micromachined switches at microwave frequencies
Author
Goldsmith, C. ; Randall, J. ; Eshelman, S. ; Lin, T.H. ; Denniston, D. ; Chen, S. ; Norvell, B.
Author_Institution
Texas Instrum. Inc., Dallas, TX, USA
Volume
2
fYear
1996
fDate
17-21 June 1996
Firstpage
1141
Abstract
This article reviews the fundamental characteristics of micromechanical membrane switches operating at microwave frequencies. The construction and theory of operation of capacitive membrane switches is reviewed. Measurement and modeling of the electromechanical and microwave properties of these switches are presented. The inherent advantages of these switches relative to semiconductor switches is discussed.
Keywords
electrostatic devices; membranes; micromachining; micromechanical devices; microwave devices; switches; capacitive membrane switches; electromechanical properties; micromachined switches; micromechanical membrane switches; microwave frequencies; Biomembranes; Contacts; Dielectric substrates; Electromechanical sensors; Fabrication; Integrated circuit technology; Micromechanical devices; Microwave frequencies; Sensor systems; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location
San Francisco, CA, USA
ISSN
0149-645X
Print_ISBN
0-7803-3246-6
Type
conf
DOI
10.1109/MWSYM.1996.511231
Filename
511231
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