Title :
Elastic surface wave devices based on piezoelectric thick films
Author :
De Cicco, G. ; Morten, B. ; Prudenziati, M.
Author_Institution :
Dipartimento di Fisica, Modena Univ.
fDate :
31 Oct-3 Nov 1993
Abstract :
A study has been performed for the development of elastic-wave structures, involving screen printed and fired piezoelectric layers on non-piezoelectric substrates, intended for new families of thick film sensors. This study considers electroacoustic effects, i.e. the coupling between the electromechanical parameters of the layers and the elastic properties of the substrate, related to wave propagation. In this work particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and anti-symmetric) Lamb waves are generated. The realisation processes and the performance characteristics of these structures are presented
Keywords :
acoustoelectric devices; piezoelectric thin films; surface acoustic wave devices; thick film devices; Al2O3; Lamb waves; SAW waves; alumina substrates; elastic surface wave devices; electroacoustic effects; piezoelectric thick films; thick film sensors; Biosensors; Electrodes; Piezoelectric devices; Piezoelectric materials; Sensor phenomena and characterization; Substrates; Surface acoustic waves; Surface waves; Thick film sensors; Thick films;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339571
