Title :
Growth and guided optical and surface acoustic wave properties of LiNbO3 thin films
Author :
Furushima, Yasuo ; Nishida, Tsutomu ; Shimizu, Maiko ; Shiosaki, T.
Author_Institution :
Dept. of Electron., Kyoto Univ.
fDate :
31 Oct-3 Nov 1993
Abstract :
Epitaxial LiNbO3 films were successfully grown on α-Al2O3(001), (012) and (110) and LiTaO3 (110 substrates) by RF magnetron sputtering. The optical guided wave propagation loss for those films was measured. The minimum optical propagation loss of the films was 6.47 dB/cm (TE0 mode) for the LiNbO3 film on LiTaO3 The theoretical calculation of the surface wave coupling coefficient predicted that the most simple and realistic configuration with its interdigital transducer on top of the LiNbO3 film and without the floating electrode gives the k2 values as high as 20.9% for the first mode and 7.4% for the 0th mode for the surface acoustic waves propagating in the [110] direction of the (110) LiNbO3 film on the (110) sapphire substrate, and values higher than 20% and 5.8% for those modes for the [12¯0] propagation on the (100) LiNbO 3 film on the (012) sapphire substrate
Keywords :
epitaxial layers; lithium compounds; optical losses; optical waveguides; piezoelectric thin films; sputtered coatings; surface acoustic wave devices; Al2O3; LiNbO3; LiNbO3 thin films; LiTaO3; epitaxial LiNbO3 films; guided optical wave properties; interdigital transducer; minimum optical propagation loss; optical guided wave propagation loss; surface acoustic wave properties; surface wave coupling coefficient; Acoustic propagation; Acoustic waves; Loss measurement; Optical films; Optical surface waves; Propagation losses; Radio frequency; Sputtering; Substrates; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1993. Proceedings., IEEE 1993
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1993.339575
