Novel micromachined LIGA microstrip transmission lines and filters

Author

Willke, T.L. ; Gearhart, S.S.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

2

fYear

1996

fDate

17-21 June 1996

Firstpage

1189

Abstract

The LIGA-micromachined microstrip line is introduced. This transmission line and the filters presented in this paper are fabricated using the LIGA micromachining process. This process allows tall (10 /spl mu/m-1 mm), high-aspect ratio metal structures to be very accurately patterned and is compatible with integrated circuit fabrication processes. The tall metal transmission lines will enable the development of high-power monolithic circuits as well as couplers and filters that require very high coupling levels. In this paper, low-pass and bandpass filters fabricated using 120 and 160 /spl mu/m-tall nickel microstrip lines are demonstrated.

Keywords

X-ray lithography; band-pass filters; electroforming; low-pass filters; micromachining; microstrip filters; microstrip lines; LIGA micromachining; Ni; bandpass filter; fabrication; high-aspect ratio metal structure; high-power monolithic circuit; low-pass filter; microstrip filter; microstrip transmission line; Band pass filters; Couplers; Coupling circuits; Distributed parameter circuits; Fabrication; Impedance; Microstrip filters; Power transmission lines; Transmission line theory; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1996., IEEE MTT-S International

Conference_Location

San Francisco, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-3246-6

Type

conf

DOI

10.1109/MWSYM.1996.511242

Filename

511242