Title :
One step non-contact fabrication of polymer microlens arrays by thermocapillary lithography
Author :
McLeod, Euan ; Troian, Sandra M.
Author_Institution :
Lab. of Interfacial & Small Scale Transp., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Thermocapillary lithography, a continuous-relief patterning technique, is used to fabricate polymer microlens arrays with variable pitch and focal length. Pattern definition results from sculpting by thermocapillary forces imposed by a cooled mask.
Keywords :
capillarity; lithography; masks; microlenses; optical arrays; optical fabrication; optical polymers; continuous relief patterning technique; cooled mask; noncontact fabrication; pattern definition; polymer microlens arrays; thermocapillary lithography; variable focal length; variable pitch; Fabrication; Lenses; Microoptics; Optical interferometry; Pins; Polymers; Three dimensional displays;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
