DocumentCode
2231297
Title
The MMST Future-Factory Vision
Author
Doering, Robert R.
Author_Institution
Texas Instruments, Inc., Semiconductor Process and Design Center
fYear
1993
fDate
18-19 Oct 1993
Firstpage
2
Lastpage
3
Keywords
Automatic control; Computer integrated manufacturing; Instruments; Integrated circuit technology; Microelectronics; Process control; Process design; Production facilities; Semiconductor device manufacture; Workstations;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682466
Filename
682466
Link To Document